Metrology products

We offer range of the products targeting smart measurement, defect classification optimization and simulation

XXX_Hub 2026 S1

What is UNI_Meas_Hub can do for you.

Uni_Meas_Hub build around advanced CDSEM measurement flow based on Pattern recognition and Measurement vector transfer. The difference that all OEM manufacturers offer 1Layer-1PR-NMeas approach. We are offering NLayers-NPRs-NMeas scheme - means that you have multiple ways for recipe creation and gradual imporvements.
Can operate on any OEM image formats (8 or 16 bit).
Extremely flexible for new algo incorporation - a new kind of measurement could be creates by adding new python code without recompilation.
Build for precision and accuracy for classic and advanced CDSEM measurements
Based on Python dedicated connection.
Measurement Utility could be programmed to perform almost any required CDSEM measurement just by creating simple recipe by local technicians after 3 days of training.
Simple and transperent *.json recipe format - customer could see any step performed for image measurement.

Measurement Suite build for versatility and robustness for classic and advanced non standart CD and Inspection measurements.
New kind of measurement could be creates by adding new native VBAI/LabVIEW/Python code without recompilation
Can operate on any image formats (8/16/32 bits) including color imaging.
Embedded PR/Morphology/Texture/Golden comparison/Geometry and other VBAI modules.
Extremely fast execution with VBAI/LabVIEW modules (ANCI C background) and Python modules (NumPy/Pytorch libraries).
Simple csv output, no native formats
High level of training required for integration of modules so offered product will include support for recipe creation.
Build for precision and accuracy for classic and advanced CDSEM measurements - focus on Inspection and Stochastic measurements.

Images for Measurement: CDSEM/CROSSECTIONS/OPTICAL
Features for Measurement: Line/Space/Contact/Pillar/Rotated/Striated/Pitch
Measurement output: CD/STD/PSD/Overlay/Resolution/SNR etc..
MultiLayer/MultiPattern/MultiMeasurement flow.
Ability to perform cross computation between layers/patterns measurements.
Natural support for SE/BSE detector signals
Support processing up to 5 different detectors for stable measurement.
Measurement Algorithms: Gray Level, Gradient
Image preprocessing: Linear, Adaptive, Kernels
Waveform Fitting :Gaussian, Wavelet, NN coders (patented).
Denoising:
- Classical with self convergence of parameters
- AI Blind denoiser with Self supervision (patented).
- AI pretrained denoisers
Addition features:
- Edge extraction
- EHAR slant for Deep structures (Contacts and Trenches)-patented

Images for Measurement: CDSEM/OPTICAL/TEM/STEM
Features for Measurement: Per customer requirement
Measurement output: Per customer requirement
Ability to perform cross computation between any kind of measurements.
Measurement Algorithms: Gray Level, Gradient, Projection Edge
Image preprocessing: Best to fit customer specification
Waveform Fitting : Bear to fit customer specification.
Denoising: Best to fit customer specification
Measurement Suite is the best suited for non trivial measurement which could be comprized as local measurements for image sequence or require specific modelling - for example:
- Heights and Slope trench measurement for dual angle collection of tilted SEM tool.
- Profile prediction from secondary electron responce.
- Fine edge detection for EPE
- Process simulation.
Recipe have the best know flow to satisfy customer requirement